Geometric Optimization of Mini Chain Under Reverse-Driving Conditions in Semiconductor-Manufacturing Transfer Systems

Kyu-Cheol Choi; Gi-Chan Kim; Yun-Ho Ko; Jea-ho Jung

doi:10.7734/COSEIK.2026.39.2.89

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2026 Vol.39, Issue 2 Preview Page Next Page

Research Paper

Geometric Optimization of Mini Chain Under Reverse-Driving Conditions in Semiconductor-Manufacturing Transfer Systems 반도체 생산장비 역구동 이송시스템을 위한 미니체인 형상 최적화 방안 연구

30 April 2026. pp. 89-96

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Abstract

Cable transport systems in semiconductor-manufacturing equipment are subjected to fatigue loads owing to repetitive operating conditions. In particular, under reverse-driving conditions—where the lower supporting structure is removed and the equipment is driven from the lower end—the load-transfer path differs from that of conventional forward-driving systems, thus resulting in distinct stress behavior in terms of the timing and location of maximum-stress occurrence. However, structural analyses and design optimization studies that consider the actual operating conditions of reverse-driving transport systems are few. In this study, a structural analysis reflecting the operating conditions of a reverse-driving transport system was performed to analyze the stress-distribution characteristics of a mini chain, and the locations and causes of maximum stress were identified. Additionally, a geometric optimization model for reducing the maximum stress was proposed. The result shows that the proposed optimization model reduced stress by approximately 60% compared with the original structure. The findings of this study provide design guidelines for mini chains applicable to reverse-driving environments and may contribute to improving the structural reliability of cable transport systems in semiconductor-manufacturing equipment.

Keywords

cable transport system

mini chain

reverse-driving condition

operating condition-based analysis

structural analysis

stress distribution

structural reliability

geometric optimization

반도체 생산장비의 케이블 이송 시스템은 반복적인 구동 환경에서 피로 하중에 노출되며, 특히 하부 지지 구조가 제거되고 장비 하단이 구동되는 역구동 조건에서는 하중 전달 경로가 기존 정구동 시스템과 달라져 최대 응력의 발생 시점과 위치가 상이한 응력 거동을 보인다. 그러나 이러한 역구동 이송 시스템의 실제 운용 조건을 고려한 구조 해석 및 설계 최적화에 관한 연구는 충분히 이루어지지 않았다. 본 연구에서는 역구동 이송 시스템의 운용 조건을 반영한 구조 해석을 수행하여 미니체인의 응력 분포 특성을 분석하고, 최대 응력 발생 위치 및 원인을 규명하였다. 또한 최대 응력 저감을 목표로 형상 최적화 모델을 제안하였다. 그 결과 제안된 최적화 모델을 통해 기존 구조 대비 최대 약 60%의 응력 감소 효과를 확인하였다. 본 연구 결과는 역구동 환경에서의 미니체인 구조 설계 방향을 제시하며, 반도체 생산장비 이송 시스템의 구조적 신뢰성 향상에 기여할 수 있을 것으로 기대된다.

키워드

케이블 이송 시스템

미니 체인

역구동 조건

운전 조건 기반 해석

구조 해석

응력 분포

구조 신뢰성

형상 최적화

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Information

Publisher :Computational Structural Engineering Institute of Korea
Publisher(Ko) :한국전산구조공학회
Journal Title :Journal of the Computational Structural Engineering Institute of Korea
Journal Title(Ko) :한국전산구조공학회 논문집
Volume : 39
No :2
Pages :89-96
Received Date : 2026-01-02
Revised Date : 2026-01-12
Accepted Date : 2026-01-13
DOI :https://doi.org/10.7734/COSEIK.2026.39.2.89

Journal of the Computational Structural Engineering Institute of Korea ISSN:1229-3059(Print) 2287-2302(Online) 한국전산구조공학회 논문집

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