Measurement on the Natural Frequency of a Laminated Cantilever Microbeam using a Laser Interferometer

Yun-Young Kim; Bong-Koo Han

doi:10.7734/COSEIK.2018.31.1.17

All Issue

2018 Vol.31, Issue 1 Preview Page Next Page

Measurement on the Natural Frequency of a Laminated Cantilever Microbeam using a Laser Interferometer 레이저 간섭계를 이용한 적층 마이크로 외팔보의 고유진동수 측정

2018. pp. 17-21

PDF XML

Abstract

The natural frequency of a laminated cantilever microbeam was studied in the present investigation. The microbeam was made of quartz on a silicon chip, and its top and bottom surfaces were coated with thin(～30nm) gold films. An ultrasonic testing platform was employed to resonate the microbeam, and its time domain signal was optically measured. The natural frequency was quantified through the fast Fourier transform of the waveform, and the result showed good agreement with a theoretical estimation from the classical beam theory. This study is expected to provide a dynamic evaluation technique for micro/nanoscale materials and micromechanical structures.

Keywords

laminate cantilever microbeam

natural frequency

laser interferometer

beam theory

오늘날까지 적층 마이크로 외팔보의 고유진동수에 대하여 연구가 진행되었다. 마이크로 보는 실리콘 재질로 만들어 지지 만, 그것의 상하 표면은 얇은 금 박막층(~30nm)이 증착되어 있다. 초음파 검사를 위해 초음파 테스트 플랫폼을 사용했으며, 시간영역 신호는 광학적으로 측정되었다. 고유진동수는 파형을 고속 Fourier 변환을 통해 정량화하였으며, 결과적으로 고전 적인 보 이론과 일치하는 결과를 보여 주었다. 본 연구는 마이크로/나노스케일 재료와 마이크로 구조에 대한 동적평가기법 을 제공할 것으로 기대된다.

키워드

적층 마이크로 외팔보

고유진동수

레이저 간섭계

보 이론

References

Ali, S.M., Mantell, S.C. and Longmire, E.K., 2011. Mechanical Performance of Microcantilevers in Liquids.. J. Microelectromech. Syst., 20, pp.441-450.

10.1109/JMEMS.2011.2107883

H. Bourouina R. Yahiaoui Shear Effect on Dynamic Behavior of Microcantilever Beam with Manufacturing Process Defects2016Microsyst. Technolo16

10.1007/s00542-016-3078-x

Comella, B.T. and Scanlon, M.R., 2000. The Determination of the Elastic Modulus of Microcantilever Beams Using Atomic Force Microscopy.. J. Mater. Sci., 35, pp.567-572.

10.1023/A:1004712007729

CorteI?s, F. and SarrA-a, I., 2015. Dynamic Analysis of Three-layer Sandwich Beams with Thick Viscoelastic Damping Core for Finite Element Applications.. Shock Vib., 2015, p.736256.

10.1155/2015/736256

Enning, R., Ziegler, D., Nievergelt, A., Friedlos, R., Venkataramani, K. and Stemmer, A., 2011. A High Frequency Sensor for Optical Beam Deflection Atomic Force Microscopy.. Rev. Sci. Instrum., 82, p.043705.

10.1063/1.357532221529011

Kim, Y.Y., Lee, S., Park, J. and Cho, Y., 2017. Ultrasonic Characterization of a Resonating High- Speed Microcantilever.. Trans. Korean Soc. Mech. Eng. A, 41, pp.483-489.

Kim, H.C. and Lee, S.H., 2012. Sensing System for Measuring Deflection of Microcantilever.. Trans. Korean Soc. Mech. Eng. A, 36, pp.961-964.[in Korean].

10.3795/KSME-B.2012.36.9.961

L.D. Landau E.M. Lifshitz Theory of Elasticity.OxfordPergamon Press1970

Li, M., Tang, H.X. and Roukes, M.L., 2007. Ultrasensitive NEMS-based Cantilevers for Sensing, Scanned Probe and Very High-frequency Applications.. Nat. Nanotechnol., 2, pp.114-120.

10.1038/nnano.2006.20818654230

S. Na J. Park K. Chang 2013Detection of Silver Ion Using Microcantilever ?(tm)s Resonant FrequencyProc. KSNVE Annual Spring ConferenceYeosu, Korea807808

Tang, Y., Fang, J., Yan, X. and Ji, H-F., 2004. Fabrication and Characterization of SiO2 Microcantilever for Microsensor Application.. Sens. Actuators B Chem., 97, pp.109-113.

10.1016/j.snb.2003.08.003

Information

Publisher :Computational Structural Engineering Institute of Korea
Publisher(Ko) :한국전산구조공학회
Journal Title :Journal of the Computational Structural Engineering Institute of Korea
Journal Title(Ko) :한국전산구조공학회 논문집
Volume : 31
No :1
Pages :17-21
Received Date : 2017-08-20
Revised Date : 2017-12-05
Accepted Date : 2017-12-06
DOI :https://doi.org/10.7734/COSEIK.2018.31.1.17

Journal of the Computational Structural Engineering Institute of Korea ISSN:1229-3059(Print) 2287-2302(Online) 한국전산구조공학회 논문집

All Issue